University Research Core Facility Boilerplate Descriptions

Date of this Version

2-23-2015

Keywords

boilerplate, grant, nanofabrication, cleanroom, nano, nanotechnology, atomic force microscopy, AFM, electron microscopy, ellipsometer, profilometer, lithography, maskmaking, dry etching, metal deposition, wet etching, thermal processing, deposition, evaporator, oxidation

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