Scifres Nanofabrication Laboratory (Cleanroom)

Author

Ron Reger, Purdue UniversityFollow
Purdue University Office of Research

Keywords

boilerplate, grant, nanofabrication, cleanroom, nano, nanotechnology, atomic force microscopy, AFM, electron microscopy, ellipsometer, profilometer, lithography, maskmaking, dry etching, metal deposition, wet etching, thermal processing, deposition, evaporator, oxidation, semiconductor processing

Date of this Version

8-2023

Recommended Citation

Reger, Ron and Purdue University Office of Research, "Scifres Nanofabrication Laboratory (Cleanroom)" (2023). University Research Core Facility Boilerplate Descriptions. Paper 15.
https://docs.lib.purdue.edu/ovprcores/15