University Research Core Facility Boilerplate Descriptions
Keywords
boilerplate, grant, nanofabrication, cleanroom, nano, nanotechnology, atomic force microscopy, AFM, electron microscopy, ellipsometer, profilometer, lithography, maskmaking, dry etching, metal deposition, wet etching, thermal processing, deposition, evaporator, oxidation, semiconductor processing
Date of this Version
5-6-2026
Recommended Citation
Reger, Ron and Purdue University Office of Research, "Scifres Nanofabrication Laboratory (Cleanroom)" (2026). University Research Core Facility Boilerplate Descriptions. Paper 15.
https://docs.lib.purdue.edu/ovprcores/15
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