Abstract
A focused ion beam (FIB) is used to sequentially reduce the contact length of an evaporated metal film to a multiwalled carbon nanotube (MWCNT). By using this FIB contact cutback technique, the contact resistance between an individual MWCNT and evaporated thin films of Au, Au/Ti, and Ag are accurately determined. The data permit a rational way to specify the minimum contact length of a metallic thin film to a MWCNT. (c) 2008 American Institute of Physics.
Published in:
Applied Physics Letters 92,21 (2008) 213112 1-3;
Link to original published article:
http://dx.doi.org/10.1063/1.2931081
Keywords
Physics, Applied
Date of Version
January 2008
Recommended Citation
Lan, C.; Zakharov, D. N.; and Reifenberger, R. G., "Determining the optimal contact length for a metal/multiwalled carbon nanotube
interconnect" (2008). Department of Physics and Astronomy Faculty Publications. Paper 630.
https://docs.lib.purdue.edu/physics_articles/630