"Optical direct-write nanolithography based on self-assembled resist" by Meghana Akella

Date of Award

Summer 2014

Degree Type

Thesis

Degree Name

Master of Science in Mechanical Engineering (MSME)

Department

Mechanical Engineering

First Advisor

Liang Pan

Committee Chair

Liang Pan

Committee Member 1

Kartik B. Ariyur

Committee Member 2

Jitesh Panchal

Abstract

Holographic display is being developed for next generation mobile phones. However, manufacturing of miniature gratings for the holographic projectors cost a few thousand dollars today, not making the concept practical for commercial purposes. In this thesis, we discuss the feasibility of self-assembled nanoparticles to manufacture holographic gratings cost-effectively and at the nanoscale. Using our approach, the gratings can be manufactured at the scale of 20nm and the cost per chip is expected to cost a few dollars.^ In this thesis, a hydrophobic SAM was used to modify the surface of silicon. Direct-write UV laser lithography was used for photothermal patterning and obtain a hydrophobic-hydrophilic pattern. Experimental and numerical analysis of the patterning technique was done to investigate a possibility photothermal patterning mechanism. Lastly, the patterned substrate was functionalized with gold nanoparticle SAM to show the feasibility of producing the holographic gratings.

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