Title
Radiation Induced Surface Modification and Contamination for EUV Lithography and Fusion Applications
Date of Award
5-2014
Degree Type
Dissertation
Degree Name
Doctor of Philosophy (PhD)
Department
Nuclear Engineering
First Advisor
Ahmed Hassanein
Committee Member 1
Anter El-Azab
Committee Member 2
Edwin Garcia
Committee Member 3
Sivanandan Harilal
Committee Member 4
Zinetula Insepov
Recommended Citation
Al-Ajlony, Al-Montaser Bellah Ahmad, "Radiation Induced Surface Modification and Contamination for EUV Lithography and Fusion Applications" (2014). Open Access Dissertations. 1046.
https://docs.lib.purdue.edu/open_access_dissertations/1046
COinS