Frequency response of LaAlO3/SrTiO3 all-oxide field-effect transistors

Abstract

The frequency response of all oxide field-effect transistors with amorphous LaAlO3 on a crystalline SrTiO3 substrate is reported. The intrinsic cut-off frequencies of 4 mu m gate-length devices are found to be approximately 17 MHz indicating that with gate length scaling gigahertz cut-off frequency is possible. The low cut-off frequency is primarily limited by the low effective mobility. The estimated effective mobility value determined from the S-parameter measurement is 3.8 cm(2)/Vs, which is consistent with previous reports. Small-signal equivalent circuit model parameters are extracted by fitting to on-wafer measured S-parameters. Good agreement is obtained between measured and simulated S-parameters based on the equivalent circuit model. (C) 2012 Elsevier Ltd. All rights reserved.

Keywords

Field-effect transistor; Heterojunction; Lanthanum aluminate; Strontium titanate; INTERFACE

DOI

10.1016/j.sse.2012.05.044

Citation

Solid-State Electronics Volume 76, October 2012, Pages 1–4

Date of this Version

10-2012

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