A Batch-Fabricated Single-Layer Elastomeric Actuator With Corrugated Surface
Abstract
In this paper, we report on the first laser-micromachined batch-fabricated single-layer elastomeric actuator with a corrugated surface profile. The structural material of the cantilever actuator is a single [polydimethylsiloxane (PDMS)] layer, and electrodes are soft lithographically patterned conductive carbon grease. The asymmetric corrugated surface provides a bending moment in a single PDMS layer without the need for a second inactive layer. An actuator which is 5 mm long, 1 mm wide, and 80 mu m thick can generate up to 2-mm out-of-plane displacement with zero applied force and 15 mu N at zero deflection while consuming 20 mu W of static power when actuated with 500 V.
Keywords
Carbon grease; elastomeric actuators; electrostrictive polymers; laser micromachining; polydimethylsiloxane (PDMS); DIELECTRIC ELASTOMERS; ARTIFICIAL MUSCLES; DESIGN; BLENDS
DOI
10.1109/JMEMS.2012.2192909
Citation
Journal of Microelectromechanical Systems. Volume: 21, Issue: 4, Aug. 2012
Date of this Version
8-2012
Recommended Citation
Maleki, Teimour; Chitnis, Girish; Kim, Albert; and Ziaie, Babak, "A Batch-Fabricated Single-Layer Elastomeric Actuator With Corrugated Surface" (2012). Birck and NCN Publications. Paper 880.
http://dx.doi.org/10.1109/JMEMS.2012.2192909