Squeeze-Film Hydrogel Deposition and Dry Micropatterning
Abstract
In this technical note, we demonstrate a squeeze-film based spacer-free method for creating controllable sub-micrometer hydrogel films on planar substrates that can be used to photolithographically fabricate hydrogel microstructures. This new technique improves the photolithographic resolution and yield by providing a uniform and low-defect hydrogel film. The optimum polymerization initiation time for achieving such a layer was determined to be around 1 min. For patterning, the dried hydrogel film was coated with a parylene-C masking layer. Subsequent etching in oxygen plasma was used to transfer selected patterns of hydrogel to the substrate in a batch scale.
Keywords
FLOW-CONTROL; DRUG-DELIVERY; POLYMER GELS; SENSORS; SYSTEMS
Date of this Version
4-2010
Recommended Citation
Ding, Zhenwen; Salim, Amani; and Ziaie, Babak, "Squeeze-Film Hydrogel Deposition and Dry Micropatterning" (2010). Birck and NCN Publications. Paper 629.
https://docs.lib.purdue.edu/nanopub/629