Fabrication and characterization of solid-state nanopores using a field emission scanning electron microscope

Author

• Hung Chang, Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue University,Follow
• Samir Iqbal, Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue UniversityFollow
• E A. Stach, Birck Nanotechnology Center and School of Materials Engineering, Purdue UniversityFollow
• Alexander H. King, Birck Nanotechnology Center and School of Materials Engineering, Purdue UniversityFollow
• Nestor J. Zaluzec, Electron Microscopy, Materials Sciences, Division, Argonne National Laboratory
• Rashid Bashir, Birck Nanotechnology Center, School of Electrical and Computer Engineering, Weldon School of Biomedical Engineering, School of Mechanical Engineering, Purdue UniversityFollow

Abstract

The fabrication of solid-state nanopores using the electron beam of a transmission electron microscope

Date of this Version

4-17-2006

Recommended Citation

Chang, Hung; Iqbal, Samir; Stach, E A.; King, Alexander H.; Zaluzec, Nestor J.; and Bashir, Rashid, "Fabrication and characterization of solid-state nanopores using a field emission scanning electron microscope" (2006). Birck and NCN Publications. Paper 4.
https://docs.lib.purdue.edu/nanopub/4