A nanofluidic channel with embedded transverse nanoelectrodes

Author

• T Maleki, Purdue University - Main Campus
• Saeed Mohammadi, School of Electrical and Computer Engineering, Purdue UniversityFollow
• Babak Ziaie, Birck Nanotechnology Center, Purdue UniversityFollow

Abstract

In this paper, we demonstrate fabrication and characterization of a nanofluidic channel with embedded transverse nanoelectrodes using a combination of conventional photolithography and focused ion beam technologies. Glass-capped silicon dioxide nanochannels having 20 nm depth, 50 nm width, and 2 mu m length with embedded platinum nanoelectrodes were fabricated. Channel patency was verified through measurements of the resistivity in phosphate buffered saline and electrostatic action on charged fluorescent nanospheres. Platinum nanoelectrode functionality was also tested using transverse resistance measurements in nanochannels filled with air, deionized water, and saline solution.

Keywords

ELECTROKINETIC TRANSPORT; NANOCHANNEL FABRICATION; DNA; NANOPORE

Date of this Version

3-11-2009

Recommended Citation

Maleki, T; Mohammadi, Saeed; and Ziaie, Babak, "A nanofluidic channel with embedded transverse nanoelectrodes" (2009). Birck and NCN Publications. Paper 372.
https://docs.lib.purdue.edu/nanopub/372