Nanopatterning using NSOM probes integrated with high transmission nanoscale bowtie aperture

Author

• Nicholas Murphy-DuBay, Birck Nanotechnology Center, Purdue UniversityFollow
• Liang Wang, Birck Nanotechnology Center, Purdue UniversityFollow
• Edward C. Kinzel, Birck Nanotechnology Center, Purdue UniversityFollow
• Sreemanth MV Uppuluri, Birck Nanotechnology Center, Purdue UniversityFollow
• Xianfan Xu, Birck Nanotechnology Center, School of Materials Engineering, Purdue UniversityFollow

Abstract

Nanoscale ridge aperture antennas have been shown to have high transmission efficiency and confined nanoscale radiation in the near field region compared with regularly-shaped apertures. The radiation enhancement is attributed to the fundamental electric-magnetic field propagating in the TE10 mode concentrated in the gap between the ridges. This paper reports experimental demonstration of field enhancement using such ridge antenna apertures in a bowtie shape for the manufacture of nanometer size structures using an NSOM (near field scanning optical microscopy) probe integrated with nanoscale bowtie aperture. Consistent lines with width of 59 nm and as small as 24 nm have be written on photoresist using such probes.

Keywords

PLANAR NANO-APERTURES; OPTICAL NEAR-FIELD; DATA-STORAGE; LITHOGRAPHY; DIFFRACTION

Citation

18 February 2008 / Vol. 16, No. 4 / OPTICS EXPRESS 2584

Date of this Version

2-18-2008

Recommended Citation

Murphy-DuBay, Nicholas; Wang, Liang; Kinzel, Edward C.; Uppuluri, Sreemanth MV; and Xu, Xianfan, "Nanopatterning using NSOM probes integrated with high transmission nanoscale bowtie aperture" (2008). Birck and NCN Publications. Paper 326.
https://docs.lib.purdue.edu/nanopub/326