Vertical single- and double-walled carbon nanotubes grown from modified porous anodic alumina templates
Date of this Version1-1-2006
Professor Joeph Irudayaraj for access to the Raman instrument; funding from the NASA-Purdue Institute for nanoelectronics and Computing and the Birck Nanotechnology Center
This document has been peer-reviewed.
Vertical single-walled and double-walled carbon nanotube (SWNT and DWNT) arrays have been grown using a catalyst embedded within the pore walls of a porous anodic alumina (PAA) template. The initial film structure consisted of a SiOx adhesion layer, a Ti layer, a bottom Al layer, a Fe layer, and a top Al layer deposited on a Si wafer. The Al and Fe layers were subsequently anodized to create a vertically oriented pore structure through the film stack. CNTs were synthesized from the catalyst layer by plasma-enhanced chemical vapour deposition (PECVD). The resulting structure is expected to form the basis for development of vertically oriented CNT-based electronics and sensors.