Vertical single- and double-walled carbon nanotubes grown from modified porous anodic alumina templates

Author

• Matthew R. Maschmann, Birck Nanotechnology Center and School of Mechanical Engineering, Purdue UniversityFollow
• Aaron D. Franklin, Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue UniversityFollow
• Placidus B. Amama, Birck Nanotechnology Center, Purdue UniversityFollow
• D N. ZakharovFollow
• E A. Stach, Birck Nanotechnology Center and School of Materials Engineering, Purdue UniversityFollow
• Timothy D. Sands, Birck Nanotechnology Center, School of Electrical and Computer Engineering, School of Materials Engineering, Purdue UniversityFollow
• Timothy S. Fisher, Birck Nanotechnology Center, School of Mechanical Engineering, Purdue UniversityFollow

Abstract

Vertical single-walled and double-walled carbon nanotube (SWNT and DWNT) arrays have been grown using a catalyst embedded within the pore walls of a porous anodic alumina (PAA) template. The initial film structure consisted of a SiOx adhesion layer, a Ti layer, a bottom Al layer, a Fe layer, and a top Al layer deposited on a Si wafer. The Al and Fe layers were subsequently anodized to create a vertically oriented pore structure through the film stack. CNTs were synthesized from the catalyst layer by plasma-enhanced chemical vapour deposition (PECVD). The resulting structure is expected to form the basis for development of vertically oriented CNT-based electronics and sensors.

Date of this Version

1-1-2006

Recommended Citation

Maschmann, Matthew R.; Franklin, Aaron D.; Amama, Placidus B.; Zakharov, D N.; Stach, E A.; Sands, Timothy D.; and Fisher, Timothy S., "Vertical single- and double-walled carbon nanotubes grown from modified porous anodic alumina templates" (2006). Birck and NCN Publications. Paper 23.
https://docs.lib.purdue.edu/nanopub/23