Millimeter-wave phase shifter based on waveguide-mounted RF-MEMS
Date of this Version3-2013
Psychogiou, D., Li, Y., Hesselbarth, J., Kühne, S., Peroulis, D., Hierold, C. and Hafner, C. (2013), Millimeter-wave phase shifter based on waveguide-mounted RF-MEMS. Microw. Opt. Technol. Lett., 55: 465–468.
A continuously variable transmission type W-band phase shifter based on a single pole bandpass filter tuned by MEMS actuated fingers is reported. Tuning is achieved by means of two half-wavelength long conductive fingers that synchronously rotate upwards in an antiparallel fashion. The fingers deflection results in a distributed variable shunt capacitance which in turn leads to a variable analog phase shift. For an applied DC bias voltage between 0 and 26 V, the transmission phase can be continuously varied up to 46.4 degrees at a frequency of 106 GHz with an insertion loss of less than 3.4 dB. (C) 2012 Wiley Periodicals, Inc. Microwave Opt Technol Lett 54:465468, 2013; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.27390
Nanoscience and Nanotechnology