Millimeter-wave phase shifter based on waveguide-mounted RF-MEMS

Author

• Dimitra Psychogiou, Swiss Federal Institute of Technology Zurich
• Yunjia Li, Swiss Federal Institute of Technology Zurich
• Jan Hesselbarth, University of Stuttgart
• Stephane Kuehne, Swiss Federal Institute of Technology Zurich
• Dimitrios Peroulis, Birck Nanotechnology Center, Purdue UniversityFollow
• Christofer Hierold, Swiss Federal Institute of Technology Zurich
• Christian Hafner, Swiss Federal Institute of Technology Zurich

Abstract

A continuously variable transmission type W-band phase shifter based on a single pole bandpass filter tuned by MEMS actuated fingers is reported. Tuning is achieved by means of two half-wavelength long conductive fingers that synchronously rotate upwards in an antiparallel fashion. The fingers deflection results in a distributed variable shunt capacitance which in turn leads to a variable analog phase shift. For an applied DC bias voltage between 0 and 26 V, the transmission phase can be continuously varied up to 46.4 degrees at a frequency of 106 GHz with an insertion loss of less than 3.4 dB. (C) 2012 Wiley Periodicals, Inc. Microwave Opt Technol Lett 54:465468, 2013; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.27390

Keywords

phase shifter; RF-MEMS; resonator; analog tuning

DOI

10.1002/mop.27390

Citation

Psychogiou, D., Li, Y., Hesselbarth, J., Kühne, S., Peroulis, D., Hierold, C. and Hafner, C. (2013), Millimeter-wave phase shifter based on waveguide-mounted RF-MEMS. Microw. Opt. Technol. Lett., 55: 465–468.

Date of this Version

3-2013

Recommended Citation

Psychogiou, Dimitra; Li, Yunjia; Hesselbarth, Jan; Kuehne, Stephane; Peroulis, Dimitrios; Hierold, Christofer; and Hafner, Christian, "Millimeter-wave phase shifter based on waveguide-mounted RF-MEMS" (2013). Birck and NCN Publications. Paper 1352.
http://dx.doi.org/10.1002/mop.27390