Abstract
In this Letter, we present a simple, low-temperature method for fabricating a wide-band (>80 kHz) thermo-acoustic sound generator on a porous polymeric substrate. We were able to achieve up to 80 dB of sound pressure level with an input power of 0.511 W. No significant surface temperature increase was observed in the device even at an input power level of 2.5 W. Wide-band ultrasonic performance, simplicity of structure, and scalability of the fabrication process make this device suitable for many ranging and imaging applications. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4737005]
Keywords
ULTRASONIC TRANSDUCERS; SILICON; EMITTER
DOI
10.1063/1.4737005
Citation
G. Chitnis, A. Kim, S. H. Song, A. M. Jessop, J. S. Bolton and B. Ziaie. Appl. Phys. Lett. 101, 021911 (2012); http://dx.doi.org/10.1063/1.4737005
Date of this Version
7-9-2012
Recommended Citation
Chitnis, Girish; Kim, Albert; Song, Seung Hyun; Jessop, A. M.; Bolton, J. S.; and Ziaie, Babak, "A thermophone on porous polymeric substrate" (2012). Birck and NCN Publications. Paper 1160.
http://dx.doi.org/10.1063/1.4737005
Comments
Copyright (2012) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Appl. Phys. Lett. 101, 021911 (2012) and may be found at http://dx.doi.org/10.1063/1.4737005. The following article has been submitted to/accepted by Applied Physics Letters. Copyright (2012) G. Chitnis, A. Kim, S. H. Song, A. M. Jessop, J. S. Bolton and B. Ziaie. This article is distributed under a Creative Commons Attribution 3.0 Unported License