Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems

Author

• J. Alex Chediak, University of California, Berkeley
• Zhongsheng Luo, University of California, Berkeley
• Jeonggi Seo, University of California, Berkeley
• Nathan Cheung, University of California, Berkeley
• Luke P. Lee, University of California, Berkeley
• Timothy D. Sands, Birck Nanotechology Center; School of Materials Engineering; Electrical and Computer Engineering; Purdue UniversityFollow

Abstract

Microassembly of a hybrid fluorescence detection microsystem by heterogeneous integration of a CdS thin-film filter, an (In, Ga)N thin-film blue LED, and a disposable PDMS microfluidic device onto a Si PIN photodetector substrate is described. The CdS thin film filter was deposited directly onto a photodetector by pulsed-laser deposition. A thin-film (In, Ga)N LED was then transferred by a novel “pixel-to-point” laser lift-off process from the sapphire growth substrate to the silicon photodetector substrate. The final integration step was achieved by positioning a disposable polymer microfludic device onto the excitation/detection subsystem. Pixel-to-point transfer is potentially an enabling microassembly process for the fabrication of multicolor fluorescence-based bioassays and chemical detection microsystems.

Keywords

Heterogeneous integration, Fluorescence detection, Optical thin film filter, Microsystem, Pixel-to-point transfer

Date of this Version

7-1-2003

Recommended Citation

Chediak, J. Alex; Luo, Zhongsheng; Seo, Jeonggi; Cheung, Nathan; Lee, Luke P.; and Sands, Timothy D., "Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems" (2003). Birck and NCN Publications. Paper 11.
https://docs.lib.purdue.edu/nanopub/11