Non-monotonic pressure dependence of resonant frequencies of microelectromechanical systems supported on squeeze films
Abstract
The resonant frequencies of released microcantilevers, microbeams, and microplates are among the most important response characteristics for microelectromechanical systems such as resonators, sensors, and radio frequency (RF) switches. It is generally believed that the resonance frequencies of such structures decrease monotonically as the surrounding gas pressure is increased from vacuum conditions. However, we find that for microbeams supported on gas films the natural frequencies of the device can first increase and then decrease with increasing gas pressure from vacuum, with the extent of non-monotonicity depending on device geometry. This anomalous property of a wide class of microelectromechanical systems is explained in terms of the competing inertial and compressive effects of the supporting squeeze film.
Keywords
MEMS; GAS
DOI
10.1088/0960-1317/21/2/025003
Citation
Ryan C Tung, Jin Woo Lee, Hartono Sumali and Arvind Raman. Non-monotonic pressure dependence of resonant frequencies of microelectromechanical systems supported on squeeze films. Journal of Micromechanics and Microengineering, Volume 21, Number 2
Date of this Version
2-2011
Recommended Citation
Tung, Ryan C.; Lee, Jin Woo; Sumali, Hartono; and Raman, Arvind, "Non-monotonic pressure dependence of resonant frequencies of microelectromechanical systems supported on squeeze films" (2011). Birck and NCN Publications. Paper 1063.
http://dx.doi.org/10.1088/0960-1317/21/2/025003