A batch-fabricated laser-micromachined PDMS actuator with stamped carbon grease electrodes
Abstract
In this note, we report on the development of a batch-fabricated laser-micromachined elastomeric cantilever actuator composed of a polydimethylsiloxane (PDMS) bilayer (active/inactive) and soft-lithographically patterned conductive carbon grease electrodes. The described unimorph structure has a low actuation voltage and large out-of-plane displacement. For a 4 mm long, 1 mm wide, and 80 mu m thick actuator, an out-of-plane displacement of 1.2 mm and a maximum force of 25 mu N were measured using 450 V actuation voltage.
Keywords
ELASTOMERS; DESIGN
DOI
10.1088/0960-1317/21/2/027002
Citation
T Maleki, G Chitnis, and B Ziaie. Journal of Micromechanics and Microengineering, Volume 21, Number 2
Date of this Version
2-2011
Recommended Citation
Maleki, Teimour; Chitnis, Girish; and Ziaie, Babak, "A batch-fabricated laser-micromachined PDMS actuator with stamped carbon grease electrodes" (2011). Birck and NCN Publications. Paper 1049.
http://dx.doi.org/10.1088/0960-1317/21/2/027002