Electrostatic Liquid-Metal Capacitive Shunt MEMS Switch

Author

Chung-Hao Chen, Purdue UniversityFollow
Dimitrios Peroulis, Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue UniversityFollow

Date of this Version

August 2007

Recommended Citation

Chen, Chung-Hao and Peroulis, Dimitrios, "Electrostatic Liquid-Metal Capacitive Shunt MEMS Switch" (2007). Birck Poster Sessions. Paper 14.
https://docs.lib.purdue.edu/nanoposter/14