Abstract

We study the electrical transport through single As donors incorporated in the channel of a FinFET, i.e. a donor in a three-terminal geometry. By means of spectroscopic measurements in conjuction with a NEMO-3D model, we can identify the excited states and associate them with either the donors Coulomb potential, a triangular well at the interface or a hybridized combination of the two. The correspondence between the transport measurements, the theoretical model and the local environment provides an atomic understanding of actual gated donors in a nanostructure.

Comments

Proceedings of ICPS 008 (International Conference on the Physics of Semiconductors), Rio de Janeiro, Brazil.

Keywords

Single donors, FinFET, Transport spectroscopy

Date of this Version

7-27-2008

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