Analysis on the action of oxidant in chemical mechanical polishing of 304 ultra-thin stainless steel

Author

Jianxiu Su, Henan Institute of Science and TechnologyFollow

Keywords

chemical mechanical polishing, polishing slurry, composite oxidant, ultra-thin stainless steel, material removal rate, surface roughness

Presentation Type

Oral Presentation

Recommended Citation

Su, Jianxiu, "Analysis on the action of oxidant in chemical mechanical polishing of 304 ultra-thin stainless steel" (2016). The 8th International Conference on Physical and Numerical Simulation of Materials Processing. 15.
https://docs.lib.purdue.edu/icpns/2016/session5ironandsteel/15