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Department of Electrical and Computer Engineering Technical Reports

Thin Silicon Membranes for Micromechanical Accelerometers Using Selective Epitaxial Growth Techniques

G. W. Neudeck, Purdue University, School of Electrical Engineering
J. Pak, Purdue University, School of Electrical Engineering
A. Kabir, Purdue University, School of Electrical Engineering
J. Chang, Purdue University, School of Electrical Engineering
J. Hancock, Purdue University, School of Electrical Engineering

Abstract

No abstract.

Date of this Version

February 1992

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