We report on the fabrication and characterizations of a multiaxial stretchable interconnect using room-temperature liquid-alloy-filled elastomeric microchannels. Polydimethylsiloxane (PDMS) microchannels coated at the bottom with a gold wetting layer were used as the reservoirs which were subsequently filled by room-temperature liquid alloy using microfluidic injection technique. Using a diamond-shaped geometry to provide biaxial performance, a maximum stretchability of 100% was achieved (R=0.24 ). Less than 0.02 resistance variation was measured for 180 bending. Active electronics, light emitting diode, was also integrated onto the PDMS substrate with stretchable interconnects to demonstrate stable electrical connection during stretching, bending, and twisting.
elastomers, integrated circuit interconnections, Light emitting diodes, liquid alloys, polymer films, wetting
Date of this Version
Applied Physics Letters 92,1 (2008) 011904-1;