BEHAVIOR OF PROGRAMMABLE INTERFACE TRANSDUCERS IN A ZINC-OXIDE ON SILICON SYSTEM
Abstract
The object of this thesis is to explore the behavior of a type of Surface Acoustic Wave layered configuration with an interdigital transducer placed between the ZnO layer and the oxidized silicon substrate. The interface transducer configuration, by effectively controlling the influence of substrate conductivity on the performance of the interdigital transducer, is shown to be readily programmable. The electromechanical coupling coefficient and input impedance of the configuration are evaluated by methods which include the effect of the finite conductance of the silicon substrate. Theoretical results are reported which demonstrate the dependence of interdigital transducer characteristics on layer thickness and bias. Measurements of insertion loss reveal a large dependence on bias that is in agreement with the predictions of theory. It is concluded that with a suitable choice of semiconductor resistivity and layer thickness the design of a new class of programmable device is feasible.
Degree
Ph.D.
Subject Area
Electrical engineering
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