Lithography and characterization of charged structures on semiconductor surfaces
Abstract
The progress in nanoscience is accelerating through the integration of different disciplines across the scientific community in an effort to fabricate molecular scale devices. In this scope, the incorporation of biomolecules into conventional semiconductor processes is of interest. To achieve this goal one needs to utilize the physical and chemical properties of biomolecules in new types of lithographic approaches. In this study, we investigated the usage of unconventional lithographic techniques such as Scanning Probe Microscopy based ones and soft lithography, to pattern biologically relevant materials. This thesis demonstrates the ability to fabricate nanometer sized features of polyelectrolytes on a silicon oxide surface using Dip-Pen Nanolithography (DPN). Soft lithography was also implemented to pattern polyelectrolytes at the micron length scale. We investigated the physical properties of the thin films generated via the two methods and their effect on further templating purposes. It was found that the electrostatic charges are the major factor in subsequent assembly despite the fact that the two surfaces offered different adhesion properties. Work described in this thesis demonstrates that DPN generated templates can be used for aligning and stretching long DNA molecules in a location specific manner. Additionally, it was demonstrated that one can use DNA molecules as a molecular scaffold to assemble magnetic iron oxide nanoparticles. Furthermore, it was shown that by coupling DPN and molecular lithography one could pattern DNA-templated nanoparticles via DPN.
Degree
Ph.D.
Advisors
Ivanisevic, Purdue University.
Subject Area
Condensation|Biochemistry|Biomedical research
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