Comprehensive modeling of electrostatically actuated MEMS beams including uncertainty quantification

Michael G Snow, Purdue University

Abstract

MEMS switches have offered dramatic improvements in the performance of RF systems. However, difficulties with reliability has slowed the adoption of MEMS switches in RF systems. These reliability issues are partly due to the poor manufacturing tolerances endemic to MEMS manufacturing processes. These manufacturing tolerances may cause significant variations in performance characteristics. This work focuses on electrostatically actuated MEMS beam capacitive shunt switches. A non-linear dynamic model for these switches was developed. The model accounts for a variety of physical effects including; beam stretching, residual stress, non-rigid boundary conditions, initial curvature, electrostatic fringing field, finite electrodes, squeeze film damping, and distributed contact. The effects of uncertain parameters on the outputs of the model are discovered through response surface based uncertainty quantification techniques. The model accurately predicts the actuation voltages and switching times of these MEMS switches as well as the effects of uncertain parameters. The derived model is widely applicable and accuratly reproduces the results of other models in the literature. Future researchers will be able to rapidly iterate designs and accurately understand the behavior of these switches.

Degree

M.S.M.E.

Advisors

Bajaj, Purdue University.

Subject Area

Mechanical engineering|Nanotechnology

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