Date of this Version
2009
DOI
10.1063/1.3122933
Recommended Citation
Bidkar, Rahul A.; Tung, Ryan C.; Alexeenko, Alina A.; Sumali, Hartono; and Raman, Arvind, "Unified theory of gas damping of flexible microcantilevers at low ambient pressures" (2009). School of Aeronautics and Astronautics Faculty Publications. Paper 2.
http://dx.doi.org/10.1063/1.3122933
Comments
Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in (R. Bidkar, R. Tung, A. Alexeenko, H. Sumali, and A. Raman, “Unified Theory of Gas Damping of Flexible Microcantilevers at Low Ambient Pressures,” Applied Physics Letters, Vol. 94, 163117, 3 pages, 2009.) and may be found at (http://dx.doi.org/10.1063/1.3122933). The following article has been submitted to/accepted by [Applied Physics Letters]. After it is published, it will be found at (http://dx.doi.org/10.1063/1.3122933). Copyright (2009) R. Bidkar, R. Tung, A. Alexeenko, H. Sumali, and A. Raman. This article is distributed under a Creative Commons Attribution 3.0 Unported License.