Very high-cycle fatigue failure in micron-scale polycrystalline silicon films: Effects of envrionment and surface oxide thickness
Date of this VersionJanuary 2007
Journal of Applied Physics 101, 013515 (2007): DOI: 10.1063/1.2403841
This document has been peer-reviewed.
Fatigue failure in micron-scale polycrystalline silicon structural films, a phenomenon that is not observed in bulk silicon, can severely impact the durability and reliability of microelectromechanical system devices. Despite several studies on the very high-cycle fatigue behavior of these films