Nanopatterning using NSOM probes integrated with high transmission nanoscale bowtie aperture

Nicholas Murphy-DuBay, Birck Nanotechnology Center, Purdue University
Liang Wang, Birck Nanotechnology Center, Purdue University
Edward C. Kinzel, Birck Nanotechnology Center, Purdue University
Sreemanth MV Uppuluri, Birck Nanotechnology Center, Purdue University
Xianfan Xu, Birck Nanotechnology Center, School of Materials Engineering, Purdue University

Abstract

Nanoscale ridge aperture antennas have been shown to have high transmission efficiency and confined nanoscale radiation in the near field region compared with regularly-shaped apertures. The radiation enhancement is attributed to the fundamental electric-magnetic field propagating in the TE10 mode concentrated in the gap between the ridges. This paper reports experimental demonstration of field enhancement using such ridge antenna apertures in a bowtie shape for the manufacture of nanometer size structures using an NSOM (near field scanning optical microscopy) probe integrated with nanoscale bowtie aperture. Consistent lines with width of 59 nm and as small as 24 nm have be written on photoresist using such probes.

Discipline(s)

Nanoscience and Nanotechnology