Vertical single- and double-walled carbon nanotubes grown from modified porous anodic alumina templates

Matthew R. Maschmann, Birck Nanotechnology Center and School of Mechanical Engineering, Purdue University
Aaron D. Franklin, Birck Nanotechnology Center and School of Electrical and Computer Engineering, Purdue University
Placidus B. Amama, Birck Nanotechnology Center, Purdue University
D N. Zakharov
E A. Stach, Birck Nanotechnology Center and School of Materials Engineering, Purdue University
Timothy D. Sands, Birck Nanotechnology Center, School of Electrical and Computer Engineering, School of Materials Engineering, Purdue University
Timothy S. Fisher, Birck Nanotechnology Center, School of Mechanical Engineering, Purdue University

Abstract

Vertical single-walled and double-walled carbon nanotube (SWNT and DWNT) arrays have been grown using a catalyst embedded within the pore walls of a porous anodic alumina (PAA) template. The initial film structure consisted of a SiOx adhesion layer, a Ti layer, a bottom Al layer, a Fe layer, and a top Al layer deposited on a Si wafer. The Al and Fe layers were subsequently anodized to create a vertically oriented pore structure through the film stack. CNTs were synthesized from the catalyst layer by plasma-enhanced chemical vapour deposition (PECVD). The resulting structure is expected to form the basis for development of vertically oriented CNT-based electronics and sensors.