Abstract

Recently several groups have used the reaction-diffusion (R-D) model with H2 diffusion in interpreting negative bias temperature Instability (NBTI) degradation. While the classical “H2 R-D” model can interpret long-term NBTI behavior, it is inconsistent with short-term stress data obtained by recently developed ultrafast measurements and widely used on-the-fly measurements. Moreover, experimental data from various techniques are not consistent with each other. Here, the authors show that the H2 R-D model must be generalized to consistently interpret NBTI at all time scales. The generalized model highlights the previously unappreciated role of time-zero delay in reconciling differences among the so-called delay-free on-the-fly measurements.

Keywords

Negative Bias Temperature Instability, time exponent, Reaction-Diffusion (R-D) Model, time-zero delay

Date of this Version

February 2007

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