Keywords

crack, craze, PRISM, nanotechnology, MEMS, strain, stress, simulation tool, materials, Rappture

Presentation Type

Event

Research Abstract

MEMS (Micro-electromechanical System) is a combined electrical and mechanical nano-scaled device with rapidly growing applications. We have developed a contacting radio frequency capacitive MEMS that is commonly used as capacitive switches and contact actuators in PRISM (Prediction of Reliability, Integrity and Survivability of Microsystems) lab at Purdue University. Our research team has focused on creating a simulation of MEMS’s survivability towards crazing and cracking. Our particular objective in this project is to create a tool that can help users perform complex quantitative calculations regarding the properties of different materials. This tool will generate various plots visualizing the properties, such as stress and strain analysis, deviatoric and volumetric graphs, etc. Currently, a MATLAB based interfaced tool has been created by utilizing Rapture, Rapid Application Infrastructure, designed by the nanoHUB team at Purdue University. This tool has embedded user-friendly documentations for users. In summary, we found that changing the fracture energy density per length ‘Gc/l’ ratio can affect both volumetric stress and strain, as well as deviatoric stress and strain. Also, we discovered that when the loading condition is anywhere between 1 and -0.5 exclusive, there exists more than one phase of ‘gamma’ value, usually up to three phases. These understandings allow us to develop an improved material that can withstand cracks and be used by micro-electromechanical systems industries.

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PRISM - Materials Simulation Tool

MEMS (Micro-electromechanical System) is a combined electrical and mechanical nano-scaled device with rapidly growing applications. We have developed a contacting radio frequency capacitive MEMS that is commonly used as capacitive switches and contact actuators in PRISM (Prediction of Reliability, Integrity and Survivability of Microsystems) lab at Purdue University. Our research team has focused on creating a simulation of MEMS’s survivability towards crazing and cracking. Our particular objective in this project is to create a tool that can help users perform complex quantitative calculations regarding the properties of different materials. This tool will generate various plots visualizing the properties, such as stress and strain analysis, deviatoric and volumetric graphs, etc. Currently, a MATLAB based interfaced tool has been created by utilizing Rapture, Rapid Application Infrastructure, designed by the nanoHUB team at Purdue University. This tool has embedded user-friendly documentations for users. In summary, we found that changing the fracture energy density per length ‘Gc/l’ ratio can affect both volumetric stress and strain, as well as deviatoric stress and strain. Also, we discovered that when the loading condition is anywhere between 1 and -0.5 exclusive, there exists more than one phase of ‘gamma’ value, usually up to three phases. These understandings allow us to develop an improved material that can withstand cracks and be used by micro-electromechanical systems industries.