Date of Award


Degree Type


Degree Name

Master of Science in Mechanical Engineering (MSME)


Mechanical Engineering

Committee Chair

Xianfan Xu

Committee Member 1

Amy Marconnet

Committee Member 2

Bumsoo Han


Heat is a functional importance in nanoscale devices. It will affect the function and performance of the device if not distributed properly. Since the development of nano-science, various studies have been issued on nanoscale temperature mapping utilizing a variety of techniques. Among them, optical methods are preferred due to its noninvasive characteristic. Especially, Tip Enhanced Raman Spectroscopy (TERS) performs as a tool with high spatial resolution in temperature mapping.

In this work, a homemade TERS system based on AFM is utilized as the tool for nanoscale temperature mapping. Bismuth thin film is used as nanoscale thermometer due to the characteristic that its A1g Raman peak has a linear relation with temperature variation when experiencing temperature range of hundreds of Kelvin. Bowtie aperture serves as nanoscale optical antenna to locally creates a sub-diffraction-limited hot spot under the radiation of laser. The aim of this work is to utilized Bi thin film to locate the nanoscale hots pot under TERS scan.

Temperature mapping was achieved by fitting the TERS spectrum collected from the Bi thin film with spatial resolution of 60nm