Date of Award

January 2015

Degree Type


Degree Name

Doctor of Philosophy (PhD)


Materials Engineering

First Advisor

Carol A Handwerker

Second Advisor

Rakesh Agrawal

Committee Member 1

Carol A Handwerker

Committee Member 2

Rakesh Agrawal

Committee Member 3

Elliott B Slamovich

Committee Member 4

Eric P Kvam


Semiconductor thin films and their fabrication methods have been intensively investigated in order to fulfill a wide spectrum of applications in electronic devices, optical devices, and photoelectronic devices. Solution deposition of semiconductor thin films draws increasing attention since it offers low cost, high-throughput production, and better compatibility with flexible or polymeric substrates compared to the vacuum deposition. This dissertation mainly focuses on the solution routes for depositing two groups of seminconductor thin films: kesterite copper zinc tin sulfide/selenide/sulfoselenide (Cu2ZnSn(S1-x Sex)4 (0≤x≤1) (CZTSSe) and zinc oxides (ZnO). The corresponding thin film devices based on the solution routes are also presented.