Laser direct write of silicon nanowires

James Mitchell, Purdue University
Se Jun Park, Purdue University
C Adam Watson, Purdue University
Pornsak Srisungsitthisunti, Purdue University
Chookiat Tansarawiput, Purdue University
Minghao Qi, Purdue University
Eric Stach, Purdue University
Chen Yang, Purdue
Xianfan Xu, Purdue University

Date of this Version



ISSN: 0091-3286


Using laser direct writing in combination with chemical vapor deposition to produce nanometer scale electronics holds several advantages over current large scale photolithography methods. These include single step electrical interconnect deposition, mask-less patterning, and parallel processing. When taken together they make quick production of individualized electronic circuits possible. This work demonstrates the ability of combining laser direct write and chemical vapor deposition to produce silicon wires a few hundred nanometers wide. Optimized parameters will be discussed, with a particular emphasis paid to the laser-material interactions. The feasibility for electronic applications will be shown by examining the deposition formation on a silicon dioxide surface without degrading the surface's integrity, and by evaluating the resistivity of the deposited silicon wires. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3630225]


Nanoscience and Nanotechnology