Full Three-Dimensional Quantum Transport Simulation of Atomistic Interface Roughness in Silicon Nanowire FETs
Date of this Version5-2011
IEEE Transactions on Electron Devices (May 2011) Vol 58 Issue 5, pp. 1371-1380
The influence of interface roughness scattering (IRS) on the performances of silicon nanowire (NW) field-effect transis- tors is numerically investigated using a full 3-D quantum transport simulator based on an atomistic sp3 d5 s∗ tight-binding model. An interface between silicon and silicon dioxide layers is gener- ated in a real-space atomistic representation using an experimen- tally derived autocovariance function. An oxide layer is modeled in a virtual crystal approximation using fictitious SiO2 atoms. ⟨110⟩-oriented NWs with different diameters and randomly gen- erated surface configurations are studied. An experimentally observed ON-current and threshold voltage are quantitatively cap- tured by the simulation model. The mobility reduction due to IRS is studied through a qualitative comparison of the simulation results with the experimental data.
Nanoscience and Nanotechnology