A Design for Combining Biological and Semiconductor Cleanrooms for Nanotechnology Research

John R. Weaver, Birck Nanotechnology Center at Purdue University (courtesy of Delphi Corporation)

Date of this Version


This document has been peer-reviewed.



Nanotechnology brings together various functional areas for interdisciplinary research, making it necessary for them to reside in a single facility. The conjoining of biology, biomedical engineering, and bio-nano-micro-electro-mechanical systems (MEMS) with semiconductor and MEMS processing requires that these technologies coexist in ultraclean facilities, while the facility designs and operating practices are incompatible. This case study describes a design concept in a collaborative research environment that meets biocleanliness goals and International Organization for Standardization (ISO) Class 4 particle concentrations (as defined in ISO 14644-1, Cleanrooms and associated controlled environments – Part 1: Classification of air cleanliness).