Independently addressable fields of porous anodic alumina embedded in SiO2 on Si
Date of this VersionJanuary 2008
APPLIED PHYSICS LETTERS 92, 013122
This document has been peer-reviewed.
Fields of thin-film porous anodic alumina PAA are fabricated within a SiO2 support and on independently addressable underlying metal pads. The underlying metallization provides a means for unique postprocessing to be performed on the PAA fields. Customized postprocessing is demonstrated with the synthesis of single-walled carbon nanotubes SWCNTs from an embedded catalyst in the PAA, followed by selective decoration of the SWCNTs from different PAA fields with dissimilar nanoparticles. Achieving uniquely functionalized fields of PAA on a single chip provides a scalable integration platform to be used in multiplexed chemical and biological sensing or nanoelectronic devices. © 2008 American Institute of Physics. DOI: 10.1063/1.2831002