Vapor-Phase Deposition of Monofunctional Alkoxysilanes for Sub-Nanometer-Level Biointerfacing on Silicon Oxide Surfaces

Dorvel Dorvel, University of Illinois at Urbana-Champaign
Bobby Reddy Jr., University of Illinois at Urbana-Champaign
Ian Block, University of Illinois at Urbana-Champaign
Patrick Mathias, University of Illinois at Urbana-Champaign
Susan E. Clare, Indiana University - Bloomington
Brian Cunningham, University of Illinois at Urbana-Champaign
Donald E. Bergstrom, Birck Nanotechnology Center and Bindley Bioscience Center, Purdue University
Rashid Bashir, University of Illinois at Urbana-Champaign

Date of this Version


This document has been peer-reviewed.



Improving the performance and lowering the analyte detection limits of optical and electronic biosensors is essential for advancing wide ranging applications in diagnostics and drug discovery. Most sensing methods require direct linkage of a recognition element and a sensor, which is commonly accomplished through an organic monolayer interface. Alkoxyorganosilanes are typically used to prepare sensor surfaces on dielectric oxides. However, many silanes lead to roughened or thick interfaces that degrade device sensitivity. Here, controlled vapor phase deposition of monoalkoxysilanes; is found to lead to monolayers resistant to elevated temperatures and extreme pH conditions. The formation of high density, subnanometer monolayers is demonstrated by ellipsometry, XPS, and AFM. The uniform attachment of these monofunctional silanes to such biosensing platforms as microarrays, field effect devices, and the formation of surface enhanced Raman spectroscopy substrates is demonstrated. The advantages of using this silane deposition protocol for the above technologies are also discussed.


Engineering | Nanoscience and Nanotechnology