Very high-cycle fatigue failure in micron-scale polycrystalline silicon films: Effects of envrionment and surface oxide thickness
Date of this Version1-1-2007
This document has been peer-reviewed.
Fatigue failure in micron-scale polycrystalline silicon structural films, a phenomenon that is not observed in bulk silicon, can severely impact the durability and reliability of microelectromechanical system devices. Despite several studies on the very high-cycle fatigue behavior of these films