Parametric study of synthesis conditions in plasma-enhanced CVD of high-quality single-walled carbon nanotubes

Matthew R. Maschmann, Mechanical Engineering, Birck Nanotechnology Center, Purdue University
Placidus B. Amama, Mechanical Engineering, Birck Nanotechnology Center, Purdue University
Amit Goyal, Department of Chemistry, New Jersey Institute of Technology
Zafar Iqbal, Department of Chemistry, New Jersey Institute of Technology
Roy Gat, Sekitechnotron USA
Timothy Fisher, Mechanical Engineering, Birck Nanotechnology Center, Purdue University

Abstract

High-quality single-walled carbon nanotubes (SWCNTs) have been synthesized from H2–CH4 mixtures on a MgO-supported bimetallic Mo/Co catalyst using microwave plasma-enhanced chemical vapor deposition (PECVD). Reaction parameters including temperature, H2:CH4 ratio, plasma power, and synthesis time have been examined to assess their influence on SWCNT synthesis. Raman spectroscopy and high-resolution field emission scanning electron microscopy reveal that the quality, selectivity, density and predominant diameter of SWCNTs depend on the varied synthesis parameters. Results of this study can be used to optimize SWCNT synthesis conditions and products and to improve understanding of the growth of SWCNTs by PECVD.