Nanoelectronics: Metrology and Computation

Mark S. Lundstrom, School of Electrical and Computer Engineering, Birck Nanotechnology Center, Purdue University
Jason Vaughn Clark, Network for Computational Nanotechnology, Purdue University
Gerhard Klimeck, Purdue University
Arvind Raman, Birck Nanotechnology Center, Purdue University

Date of this Version


This document has been peer-reviewed.



International Conference on Frontiers of Characterization and Metrology for Nanoelectronics Gaithersburg, MD, MAR 27-29, 2007 Natl Inst Standards & Technol; SEMATECH; Semiconductor Equipment & Mat Int; Semiconductor Res Corp; Semiconductor Int; Natl Sci Fdn; IEEE Elect Devices Soc; Appl Mat; Bede; J A Woollam Co Inc; Omicron Nanototechnol; Solid State Measurement Inc


Research in nanoelectronics poses new challenges for metrology, but advances in theory, simulation and computing and networking technology provide new opportunities to couple simulation and metrology. This paper begins with a brief overview of current work in computational nanoelectronics. Three examples of how computation can assist metrology will then be discussed. The paper concludes with a discussion of how cyberinfrastructure can help connect computing and metrology using the nanoHUB ( as a specific example.