The non-linear dynamics of electromagnetically actuated microbeam resonators with purely parametric excitations

Jeffrey F. Rhoads, Birck Nanotechnology Center, Purdue University
Vijay Kumar, Birck Nanotechnology Center, Purdue University
Steven W. Shaw, Michigan State University
Kimberly L. Turner, University of California - Santa Barbara

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Electromagnetic micro-transducers have been utilized in a number of distinct applications in recent years due, in large part, to their scalability, low power consumption, self-sensing capabilities and ease of integration with external hardware. In the present work, the highly non-linear dynamic behavior of a new class of parametrically excited, electromagnetically actuated microcantilevers is explored. The system is modeled using classical energy methods and its frequency response behavior is subsequently characterized using perturbation methods and bifurcation analysis. The recovered results provide a clear understanding of the effects of fifth-order non-linearities in a parametrically excited microresonator, and are currently guiding experimental work on electromagnetically actuated oscillators and microresonator arrays. (C) 2013 Elsevier Ltd. All rights reserved.


Nanoscience and Nanotechnology