A hybrid PDMS-Parylene subdural multi-electrode array

Manuel Ochoa, Birck Nanotechnology Center, Purdue University
Pinghung Wei, Birck Nanotechnology Center, Purdue University
Andrew Wolley, Purdue University
Kevin J. Otto, Purdue University
Babak Ziaie, Birck Nanotechnology Center, Purdue University

Date of this Version



In this paper, we report on a cost effective and simple method for fabricating a flexible multi-electrode array for subdural neural recording. The electrode was fabricated using a PDMS-Parylene bilayer to combine the major advantages of both materials. Mechanical and electrical characterizations were performed to confirm functionality of a 16-site electrode array under various flexed/bent conditions. The electrode array was helically wound around a 3 mm diameter cylindrical tube and laid over a 2 cm diameter sphere while maintaining its recording capability. Experimental results showed impedance values between 300 ka"broken vertical bar and 600 ka"broken vertical bar at 1 kHz for 90 mu m diameter gold recording sites. Acoustically evoked neural activity was successfully recorded from rat auditory cortex, confirming in vivo functionality.


Nanoscience and Nanotechnology