Cyclic Evolution of Bouncing for Contacts in Commercial RF MEMS Switches

Adam Fruehling, Birck Nanotechnology Center, Purdue University
Wei Yang, Birck Nanotechnology Center, Purdue University
Dimitrios Peroulis, Birck Nanotechnology Center, Purdue University

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This paper systematically investigates for the first time the evolution of switch bounce for the Omron 2SMES-01 switch as a function of lifetime cycling. We demonstrate that the first bounce duration monotonically increases by as much as 20% over 200 million cycles. In addition, the amplitude of tertiary bounces monotonically increase by as much as 100 % over the same interval with the spontaneous occurrence of new bounces persisting as cycle count increases. Measurement of switch bouncing provides a readily accessible form of transient analysis of RF MEMS contacts and has the potential to become an indispensable tool for in-situ switch diagnostics related to adhesion forces, contact hardening, and film formation. A novel automated platform for studying both static and dynamic switch characteristics over the lifetime of an RF MEMS switch is demonstrated as well.


Nanoscience and Nanotechnology