Wireless temperature microsensors integrated on bearings for health monitoring applications
Date of this Version2011
Wireless temperature microsensors integrated on bearings for health monitoring applications S. Scott; A. Kovacs; L. Gupta; J. Katz; F. Sadeghi; D. Peroulis Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on Year: 2011 Pages: 660 - 663
This paper reports the performance of a wireless MEMS bimorph temperature sensor integrated on a bearing for component health monitoring applications. The sensor consists of a robust array of bimorphs consisting of gold and thermally-grown oxide operable to at least 300 degrees C. Fabrication details are included, as well as the hermetic packaging information. Speed of actuation results from a high-speed camera is included showing the actuation time is less than 600 mu s. Reliability testing of the bimorph array up to 400 million thermal cycles is also shown, after which the bimorphs still yield consistent behavior. Finally, dynamic testing is performed showing actual bearing temperature values at different speeds on a real-world helicopter bearing.
Nanoscience and Nanotechnology