A batch-fabricated laser-micromachined PDMS actuator with stamped carbon grease electrodes

Teimour Maleki, Birck Nanotechnology Center, Purdue University
Girish Chitnis, Birck Nanotechnology Center, Purdue University
Babak Ziaie, Birck Nanotechnology Center, Purdue University

Date of this Version



T Maleki, G Chitnis, and B Ziaie. Journal of Micromechanics and Microengineering, Volume 21, Number 2


In this note, we report on the development of a batch-fabricated laser-micromachined elastomeric cantilever actuator composed of a polydimethylsiloxane (PDMS) bilayer (active/inactive) and soft-lithographically patterned conductive carbon grease electrodes. The described unimorph structure has a low actuation voltage and large out-of-plane displacement. For a 4 mm long, 1 mm wide, and 80 mu m thick actuator, an out-of-plane displacement of 1.2 mm and a maximum force of 25 mu N were measured using 450 V actuation voltage.


Nanoscience and Nanotechnology