A batch-fabricated laser-micromachined PDMS actuator with stamped carbon grease electrodes
Date of this Version2-2011
T Maleki, G Chitnis, and B Ziaie. Journal of Micromechanics and Microengineering, Volume 21, Number 2
In this note, we report on the development of a batch-fabricated laser-micromachined elastomeric cantilever actuator composed of a polydimethylsiloxane (PDMS) bilayer (active/inactive) and soft-lithographically patterned conductive carbon grease electrodes. The described unimorph structure has a low actuation voltage and large out-of-plane displacement. For a 4 mm long, 1 mm wide, and 80 mu m thick actuator, an out-of-plane displacement of 1.2 mm and a maximum force of 25 mu N were measured using 450 V actuation voltage.
Nanoscience and Nanotechnology