In this paper, we propose a procedure to estimate the yield strength of thin films by debonding films from their substrate by elastic-plastic buckling under thermally-induced compressive loading. The out-of-plane displacement of the metal lines under conditions of elastic-plastic buckling is dependent on the yield strength of the film. Thus, an inverse estimate of the yield strength is made from measurements of the out-of-plane displacements of the buckled metal lines. The procedure is demonstrated to estimate the yield strength of aluminum lines consistent with measurements by other techniques.


This is the author accepted manuscript of S. Goyal, K. Srinivasan, G. Subbarayan, T. Siegmund, “Estimating the yield strength of thin metal films through elastic-plastic buckling-induced debonding,” IEEE Transactions on Device and Materials Reliability 11 (2011) 358-361. The version of record is available at http://dx.doi.org/10.1109/TDMR.2011.2112362.

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Yield Strength, Metal Films, Buckling, Debond

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