"Development of a Scroll-Type Oil-Free Vacuum Pump" by T. Kushiro, K. Miyazaki et al.

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International Compressor Engineering Conference

International Compressor Engineering Conference

Title

Development of a Scroll-Type Oil-Free Vacuum Pump

Key

147

Conference Year

1990

Authors

T. Kushiro, Shin Meiwa Industry Co.
K. Miyazaki, Shin Meiwa Industry Co.
H. Kataoka, Shin Meiwa Industry Co.
S. Nii, Shin Meiwa Industry Co.
S. Machida, Hitachi

COinS